Polyurethane Impregnated Non-Woven Polishing Pads

 

The following products from Fujibo categorize themselves as high stock removal pads. These pads are polyurethane impregnated non-woven pads, and they are suitable for various applications including wafer polishing, glass polishing, hard disk, stainless steel, and copper sheet polishing.

POLYPAS #FP55 is a multi-purpose pad and is used for low-pressure polishing.
It is especially ideal for glass polishing because it provides excellent flatness when used in the second polishing stage (following a first stage polishing with a harder pad).

POLYPAS #FP65 is a semi-soft type pad used for both low- and medium pressure polishing. It is especially suitable in the first stage of polishing of silicon and GaAs wafers, photomask, and liquid crystal; providing scratch-free and haze-free results.

POLYPAS #FP75 is a standard pad used for medium-pressure polishing. This product is designed to provide excellent flatness with pressure ranging from 300 to 600 g/cm2. This multi-purpose pad is ideal for polishing silicon and compound wafers, and ceramics.

POLYPAS #FP80 is used for both medium- and high-pressure polishing. This FP series product provides best results when used in combination with pad #FP75.This pad provides a high stock removal rate, excellent flatness, and a long life.

POLYPAS #FP85, manufactured through a special hardening process, is designed to provide excellent flatness, especially for high-speed, high-pressure polishing. This FP series product is also suitable for CMP.

 

Applications

  • Silicon, LiTaO3 LiNbO3, and GaAs wafer Polishing
  • Television picture tube (CRT) and lens-grade glass polishing
  • Hard disk, stainless steel, and copper sheet polishing

 

Specifications

Product Number #FP55 #FP65 #FP75 #FP80 #FP85
Thickness mm) 1.30 1.30 1.30 1.30 1.30
Density (g/cm3) 0.35 0.35 0.37 0.35 0.50
Compressibility (%) 10.1 3.1 4.2 4.4 3.8
Elasticity (%) 76 89 67 67 66
Hardness (° ) 50 65 72 77 88

 

Note: The values above represent typical measurements. Actual values may vary in a range defined by product specifications.

  • Hardness measurements according to the Shore A gauge
  • Other measurement methods according to JISKG5O5 and L1021
  • The values above represent typical measurements. Actual values may vary in a range defined by product specifications.

 

Contact

For more information on POLYPAS Polishing Pads, please contact Marubeni America Corporation and we will send you a full brochure.