Polyurethane Impregnated Non-Woven Polishing Pads
The following products from Fujibo categorize themselves as high stock removal pads. These pads are polyurethane impregnated non-woven pads, and they are suitable for various applications including wafer polishing, glass polishing, hard disk, stainless steel, and copper sheet polishing.
POLYPAS #FP55 is a multi-purpose pad and is used for low-pressure polishing.
It is especially ideal for glass polishing because it provides excellent flatness when used in the second polishing stage (following a first stage polishing with a harder pad).
POLYPAS #FP65 is a semi-soft type pad used for both low- and medium pressure polishing. It is especially suitable in the first stage of polishing of silicon and GaAs wafers, photomask, and liquid crystal; providing scratch-free and haze-free results.
POLYPAS #FP75 is a standard pad used for medium-pressure polishing. This product is designed to provide excellent flatness with pressure ranging from 300 to 600 g/cm2. This multi-purpose pad is ideal for polishing silicon and compound wafers, and ceramics.
POLYPAS #FP80 is used for both medium- and high-pressure polishing. This FP series product provides best results when used in combination with pad #FP75.This pad provides a high stock removal rate, excellent flatness, and a long life.
POLYPAS #FP85, manufactured through a special hardening process, is designed to provide excellent flatness, especially for high-speed, high-pressure polishing. This FP series product is also suitable for CMP.
- Silicon, LiTaO3 LiNbO3, and GaAs wafer Polishing
- Television picture tube (CRT) and lens-grade glass polishing
- Hard disk, stainless steel, and copper sheet polishing
|Hardness (° )||50||65||72||77||88|
Note: The values above represent typical measurements. Actual values may vary in a range defined by product specifications.
- Hardness measurements according to the Shore A gauge
- Other measurement methods according to JISKG5O5 and L1021
- The values above represent typical measurements. Actual values may vary in a range defined by product specifications.
For more information on POLYPAS Polishing Pads, please contact Marubeni America Corporation and we will send you a full brochure.